Deus Ex, in some small part at least (although I think it's a bit more apparent than that) is highly influenced by the works of Philip K Dick. So any of the film adaptations of his work will probably do (although some as a movie are better than others).
Blade Runner
Total Recall
Minority Report
A Scanner Darkly
The more hollywood-ized films that were great stories but not great movies and probably don't fit anyway:
Adjustment Bureau
Paycheck
Of course these are more themes more so than direct inspirations. You could probably argue most scifi since Blade Runner was in some way influenced by several of these (especially Blade Runner). I mention them because of a large theme in them is consciousness, and the questions they ask are similar. I also know Philip K Dick's work is an influence of the original (and probably the newer) Deus Ex games.
Isaac Asimov has a couple of stories that were adapted with similar ideas as well however some people (especially if they were big fans of the book but not exclusively) dislike the films made about his work so mileage will definitely vary.
I, Robot
Bicentennial Man
I never saw the only other Isaac Asimov based film I know about, Nightfall.
Cyborg was a Jean Claude Van Damme film where he has to save a cyborg from some mean guy for reasons I forget. I love the movie because I saw it for the first time when I was like... 6, and it's a weird movie so it was one of the first DVDs I ever bought when DVDs were still new. It's not considered a good movie, but I love it and it's about a cyborg so I mentioned it. It's a fun B tier action flick that tries to tackle these concepts but doesn't really succeed that I recall (I just realized it's been a long time since I've seen Cyborg and I need to watch it again, damn).
Obviously there's the Terminator movies, but those touch more on AI and robots trying to destroy humanity which is the opposite of what Deus Ex is really trying to talk about so it's different. Once you go down that route it's all HAL and shit like that and that's just different from the robotic existentialism of something like Deus Ex or what I'd consider what Deus Ex is doing.
I'll mention Chappie too, because I liked it, but I'm not sure that counts either. In that arena is also Batteries not included, Iron Giant, WALL E,Short Circuit and others. There may be some amount of that which counts, but it feels somewhat different in intent. I don't know. In those robots are more like pets. Chappie maybe delves a little deeper but it never really gets where I think it wants to go with the conversation.
RoboCop. Maybe that counts. It's first and foremost a action satire film, though. It's not actually trying to say anything profound.
Ex Machina is a good mystery scifi that has interesting conversations about the topic, but I'm not sure if it counts. Or even if you'll like it. It depends. It's divisive from what I've seen. You should probably see it if you haven't, though.
Other than maybe in cartoons (or Anime) I can't think of any other live action films that have touched on bio mechanical consciousness (cyborgs, robots, or the like), and not even these touch on it as deeply as the Deus Ex games do. They are often vaguely discussed, or hinted at, concepts but no movie that I can really think of has really tackled the concepts Deus Ex generally breathes in as deeply as video games of that type tend to. Interestingly I think video games I have discussed this topic better than any film has to date. At least in what I have seen. There is so much I'm sure I missed something.
Edit: Oh, I forgot to mention Hardware which, by the posts people are making, I'm sure people will misconstrue as similar to Deus Ex because I can tell already there is a misunderstanding of what Deus Ex is and the scifi genre as a whole. It's a terrible movie with good actors in it. I recommend no one to ever watch it ever. Unless maybe you want to see how to not make a movie. It's really irredeemably bad and rips off a lot of really good movies in horrible ways. Just don't watch it.
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